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microfab vragen en antwoorden
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DownloadWhat are the typical length scales of “microfabrication”?
Omdraaien
• scales from >nm to <mm
Can you mention a number of advantages that are offered by engineering at reduced scales?
Omdraaien
• Increased functionality in smaller volume
• Special small-scale effects can be used
• Highly parallel and cost effective manufacturing (high performance at low cost)
• Minimally invasive services
• Interaction/ merging with biological materials
• Increasing strength of materials in the micro
• Low material & power consumption
Can you give a number of examples of scaling laws in physics (e.g. volume versus area, magnetic force, electrostatic force, surface tension versus gravity, ...)
Omdraaien
• As we scale down length, surface area, volume, their corresponding forces scale down differently. (friction, van der waals, surface tension. Forces that scale with volume become less important)
Surface tension -> force from surface tension scales – L
Gravitational force scales – L^3
Reducing the length by factor 2 results in a reduction of the electromagnetic force by a factor of 16 (L^4) (faradays law)
Can you mention a number of physical effects that become more and more important as sizes are scaled down?
Omdraaien
- Area, Capacitance, capacitor electric field, deformation, electrostatic force, inductance, ohmic current, Resistance, resistive power loss, shear stiffness, strength, strength to weight ratio, surface tension force, thermal conductance thermal time constant, viscous force, voltage.
Can you mention and explain a number of microfabrication methods we have available in the Microfab lab?
Omdraaien
Advanced laser microfabrication, soft lithography, (3D) printing techniques and mechanical micromachining. (Lithography, thin films, furface treatment, soft lithography, rapid prototyping of microdevices), laser fabrication, micromilling
What, do you think, are main challenges in future developments of microfabrication methods?
Omdraaien
Resolution -> As technology advances, there is a growing demand for even smaller and more intricate microfabricated structures. Achieving higher resolution and miniaturization while maintaining precision and accuracy is a significant challenge. Overcoming limitations imposed by the wavelength of light used in photolithography, which is the dominant technique in semiconductor manufacturing, is a particular concern.
Can you describe the general process of thin film deposition / lithography/ etching processes to realize a microsystems structure?
Omdraaien
Thin film deposition
- Vacuum techniques
Reducing the particle density so that the mean free path for collision is long
Reducing the particle density of undesirable atoms and molecules (contaminant)
Providing a low pressure plasma environment
Providing a means for controlling gas and vapor composition
PVD
CVD
- Non-vacuum techniques
Spin coating
Screen printing
Lithography
Light on a mask above exposed photoresist. Negative resist, Positive resist
Etching
- Dry etching
- Wet etching
- Isotropic etching
- Anisotropic etching
Which main classes exist in vacuum deposition of thin films? What is the main difference?
Omdraaien
- Physical vapor deposition (PVD), the vapor source is a solid
- Chemical vapor deposition (CVD), the source is a chemical vapor precursor
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In winkelwagenVraag:
What are the typical length scales of “microfabrication”?
Vul het antwoord in:
Controleer antwoordVraag:
Can you mention a number of advantages that are offered by engineering at reduced scales?
Vul het antwoord in:
Controleer antwoordAntwoord:
• Increased functionality in smaller volume
• Special small-scale effects can be used
• Highly parallel and cost effective manufacturing (high performance at low cost)
• Minimally invasive services
• Interaction/ merging with biological materials
• Increasing strength of materials in the micro
• Low material & power consumption
Jouw antwoord:
input text value
Vraag opnieuw antwoorden
Vraag:
Can you give a number of examples of scaling laws in physics (e.g. volume versus area, magnetic force, electrostatic force, surface tension versus gravity, ...)
Vul het antwoord in:
Controleer antwoordAntwoord:
• As we scale down length, surface area, volume, their corresponding forces scale down differently. (friction, van der waals, surface tension. Forces that scale with volume become less important)
Surface tension -> force from surface tension scales – L
Gravitational force scales – L^3
Reducing the length by factor 2 results in a reduction of the electromagnetic force by a factor of 16 (L^4) (faradays law)
Jouw antwoord:
input text value
Vraag opnieuw antwoorden
Vraag:
Can you mention a number of physical effects that become more and more important as sizes are scaled down?
Vul het antwoord in:
Controleer antwoordAntwoord:
- Area, Capacitance, capacitor electric field, deformation, electrostatic force, inductance, ohmic current, Resistance, resistive power loss, shear stiffness, strength, strength to weight ratio, surface tension force, thermal conductance thermal time constant, viscous force, voltage.
Jouw antwoord:
input text value
Vraag opnieuw antwoorden
Vraag:
Can you mention and explain a number of microfabrication methods we have available in the Microfab lab?
Vul het antwoord in:
Controleer antwoordAntwoord:
Advanced laser microfabrication, soft lithography, (3D) printing techniques and mechanical micromachining. (Lithography, thin films, furface treatment, soft lithography, rapid prototyping of microdevices), laser fabrication, micromilling
Jouw antwoord:
input text value
Vraag opnieuw antwoorden
Vraag:
What, do you think, are main challenges in future developments of microfabrication methods?
Vul het antwoord in:
Controleer antwoordAntwoord:
Resolution -> As technology advances, there is a growing demand for even smaller and more intricate microfabricated structures. Achieving higher resolution and miniaturization while maintaining precision and accuracy is a significant challenge. Overcoming limitations imposed by the wavelength of light used in photolithography, which is the dominant technique in semiconductor manufacturing, is a particular concern.
Jouw antwoord:
input text value
Vraag opnieuw antwoorden
Vraag:
Can you describe the general process of thin film deposition / lithography/ etching processes to realize a microsystems structure?
Vul het antwoord in:
Controleer antwoordAntwoord:
Thin film deposition
- Vacuum techniques
Reducing the particle density so that the mean free path for collision is long
Reducing the particle density of undesirable atoms and molecules (contaminant)
Providing a low pressure plasma environment
Providing a means for controlling gas and vapor composition
PVD
CVD
- Non-vacuum techniques
Spin coating
Screen printing
Lithography
Light on a mask above exposed photoresist. Negative resist, Positive resist
Etching
- Dry etching
- Wet etching
- Isotropic etching
- Anisotropic etching
Jouw antwoord:
input text value
Vraag opnieuw antwoorden
Vraag:
Which main classes exist in vacuum deposition of thin films? What is the main difference?
Vul het antwoord in:
Controleer antwoordAntwoord:
- Physical vapor deposition (PVD), the vapor source is a solid
- Chemical vapor deposition (CVD), the source is a chemical vapor precursor
Jouw antwoord:
input text value
Vraag opnieuw antwoorden
Ontgrendel alle 60 oefenvragen
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Gemaakt opBekijk alle 60 oefenvragen
-
What are the typical length scales of “microfabrication”?
• scales from >nm to <mm -
Can you mention a number of advantages that are offered by engineering at reduced scales?
• Increased functionality in smaller volume
• Special small-scale effects can be used
• Highly parallel and cost effective manufacturing (high performance at low cost)
• Minimally invasive services
• Interaction/ merging with biological materials
• Increasing strength of materials in the micro
• Low material & power consumption
-
Can you give a number of examples of scaling laws in physics (e.g. volume versus area, magnetic force, electrostatic force, surface tension versus gravity, ...)
• As we scale down length, surface area, volume, their corresponding forces scale down differently. (friction, van der waals, surface tension. Forces that scale with volume become less important)
Surface tension -> force from surface tension scales – L
Gravitational force scales – L^3
Reducing the length by factor 2 results in a reduction of the electromagnetic force by a factor of 16 (L^4) (faradays law)
-
Can you mention a number of physical effects that become more and more important as sizes are scaled down?
- Area, Capacitance, capacitor electric field, deformation, electrostatic force, inductance, ohmic current, Resistance, resistive power loss, shear stiffness, strength, strength to weight ratio, surface tension force, thermal conductance thermal time constant, viscous force, voltage. -
Can you mention and explain a number of microfabrication methods we have available in the Microfab lab?
Advanced laser microfabrication, soft lithography, (3D) printing techniques and mechanical micromachining. (Lithography, thin films, furface treatment, soft lithography, rapid prototyping of microdevices), laser fabrication, micromilling -
What, do you think, are main challenges in future developments of microfabrication methods?
Resolution -> As technology advances, there is a growing demand for even smaller and more intricate microfabricated structures. Achieving higher resolution and miniaturization while maintaining precision and accuracy is a significant challenge. Overcoming limitations imposed by the wavelength of light used in photolithography, which is the dominant technique in semiconductor manufacturing, is a particular concern. -
Can you describe the general process of thin film deposition / lithography/ etching processes to realize a microsystems structure?
Thin film deposition
- Vacuum techniques
Reducing the particle density so that the mean free path for collision is long
Reducing the particle density of undesirable atoms and molecules (contaminant)
Providing a low pressure plasma environment
Providing a means for controlling gas and vapor composition
PVD
CVD
- Non-vacuum techniques
Spin coating
Screen printing
Lithography
Light on a mask above exposed photoresist. Negative resist, Positive resist
Etching
- Dry etching
- Wet etching
- Isotropic etching
- Anisotropic etching
-
Which main classes exist in vacuum deposition of thin films? What is the main difference?
- Physical vapor deposition (PVD), the vapor source is a solid
- Chemical vapor deposition (CVD), the source is a chemical vapor precursor
-
How does sputtering work (in principle)?
-
Which mechanisms determine the film deposition in CVD, especially the deposition rate?
-
Can you mention a number of non-vacuum film deposition methods?
-
How does spin coating work? What determines the film thickness?
-
Which technique allows to precisely make molecularly thin films? How does it work?
-
Why is it often necessary to treat surfaces?
-
Which surface treatments do you know? What are the results of these treatments?
-
What is (optical) lithography?
-
Which types of aligners do you know?
-
What main factors determine the resolution in projection printing lithography?
-
What is immersion lithography?
-
What is a “negative” resist?
-
What is the difference between “wet” and “dry” etching?
-
What is the difference between “isotropic” and “anisotropic” etching?
-
What happens if you wet-etch silicon? And glass?
-
What is DRIE? How does it work?
-
What do you think is batch processing?
-
What material is mainly used in soft-lithography?
-
Can you name a few reasons for the popularity of soft-litho?
-
Can you list a few soft-lithography-assisted processes?
-
What parameters limit the resolution in soft-litho?
-
What does Micromoulding have in common with soft-litho?
-
What is the main reason that drives the development of micromoulding techniques?
-
Do you know an example of an injection-moulded micropart?
-
What is nanoimprinting lithography (NIL)?
-
Do you know different configurations of NIL?
-
Can you explain what LIGA is?
-
Why do we say that additive manufacturing is disruptive?
-
Can you name a few technical varieties of additive manufacturing
techniques?
-
Can you make a list of pro’s and con’s for additive manufacturing?
-
What does CNC mean?
-
How can you create high-precision plane-parallel workpieces?
-
Why does one refer to (ultra-)rapid prototyping when mechanical
micromachining is selected?
-
What is the tool called used for cutting a groove in brass?
-
How is the out-of-cleanroom technology called to pattern brittle materials?
-
What is a blast lag?
-
Do you work with a mask in laser micromachining?
-
How is the subtractive method by radiative laser treatment called (ablation)?
-
How is the laser called you can cut plastic with?
-
What is debris?
-
How can you use lasers in assembly techniques?
-
What fundamental properties determine the resolution of optical microscopy? How can it be improved?
-
What is the difference between transmitted and reflected light microscopy?
-
Why can we measure stresses with polarized light?
-
Can you mention some advantages of fluorescent microscopy?
-
What different main modes of electron microscopy exist? How do they work (in principle)? What are typical resolutions?
-
What is AFM and how does it work?
-
Can you mention a number of classes of industrial application areas for
which microfabrication technologies have been essential?
-
What are “MEMS”? Can you give an example?
-
Which materials are typically used in microfabricated microdevices?
-
What is “Microfluidics”?
-
What are general steps to take to go from an idea to an actual product?
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